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Check out ARCApertures.com for FIB, SEM and TEM Apertures made to spec.
We produce custom FIB apertures, designed to your specifications with attention to every detail and efficient delivery. Send us your old aperture and we'll make a custom CAD file for your purposes/part number and get you a new one. Call for details- 651-789-9000.
Apertures or precision holes can be as small as sub-micron and in a variety of substrates to accomodate any application you can imagine. We have made X-ray apertures in Tungstun (W) that are 15 um X 200 um tall, this was done for a US National Lab. We also make precision X-ray apertures for analytical equipment.
For more information, visit Holonics� | 
